JPH0562829B2 - - Google Patents

Info

Publication number
JPH0562829B2
JPH0562829B2 JP60048839A JP4883985A JPH0562829B2 JP H0562829 B2 JPH0562829 B2 JP H0562829B2 JP 60048839 A JP60048839 A JP 60048839A JP 4883985 A JP4883985 A JP 4883985A JP H0562829 B2 JPH0562829 B2 JP H0562829B2
Authority
JP
Japan
Prior art keywords
pedestal
semiconductor device
view
bridge circuit
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60048839A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61208275A (ja
Inventor
Kohei Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60048839A priority Critical patent/JPS61208275A/ja
Publication of JPS61208275A publication Critical patent/JPS61208275A/ja
Publication of JPH0562829B2 publication Critical patent/JPH0562829B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP60048839A 1985-03-12 1985-03-12 半導体装置 Granted JPS61208275A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60048839A JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60048839A JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Publications (2)

Publication Number Publication Date
JPS61208275A JPS61208275A (ja) 1986-09-16
JPH0562829B2 true JPH0562829B2 (en]) 1993-09-09

Family

ID=12814413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60048839A Granted JPS61208275A (ja) 1985-03-12 1985-03-12 半導体装置

Country Status (1)

Country Link
JP (1) JPS61208275A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378577A (ja) * 1986-09-22 1988-04-08 Nippon Denso Co Ltd 半導体式加速度センサ

Also Published As

Publication number Publication date
JPS61208275A (ja) 1986-09-16

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